ABSTRACT:

In previous work, the small-scale topography evolution of the wafer surface was investigated for a typical interlevel dielectric chemical mechanical planarization process by means of a Fourier analysis of surface profiler scans. It was found that the amplitudes of the individual frequency components decay exponentially at a rate that depends on the respective spatial frequency. In this paper, a physical model of these findings is proposed, based on a linearized approximation of the Greenwood-Williamson approach to describe the contact between the pad and the wafer surface. The frequency dependency of the decay rates is attributed to the visco-elastic properties of the pad material (polyurethane). This connection is consistent with dielectric susceptibility measurements that show that the observed frequency dependency stems from a visco-elastic beta-transition in polyurethane. The resulting model not only describes the experimental data for a previous test pattern but also shows good agreement to measurements of a typical dynamic random access memory topography after chemical mechanical polishing. In addition, the current model reduces the systematic errors of the predicted topography as compared to the previous empirical model.


Did you like this research project?

To get this research project Guidelines, Training and Code... Click Here


PROJECT TITLE :Beamforming Optimization for Physical Layer Security in MISO Wireless Networks - 2018ABSTRACT:A wireless network of multiple transmitter-user pairs overheard by an eavesdropper, where the transmitters are equipped
PROJECT TITLE :A Systems Theoretic Approach to the Security Threats in Cyber Physical Systems Applied to Stuxnet - 2018ABSTRACT:Cyber physical systems (CPSs) are increasingly being adopted in a very big selection of industries
PROJECT TITLE :Physical Attestation in the Smart Grid for Distributed State Verification - 2018ABSTRACT:A malicious process in a very distributed system can fabricate its internal state in its communications with its peers. These
PROJECT TITLE :On the Interplay Between Cyber and Physical Spaces for Adaptive Security - 2018ABSTRACT:Ubiquitous computing is ensuing in an exceedingly proliferation of cyber-physical systems that host or manage valuable physical
PROJECT TITLE :Architectural Protection of Application Privacy against Software and Physical Attacks in Untrusted Cloud Environment - 2018ABSTRACT:In cloud computing, it is usually assumed that cloud vendors are trusted; the guest

Ready to Complete Your Academic MTech Project Work In Affordable Price ?

Project Enquiry