MEMS Scale PVDF-TrFE-Based Piezoelectric Energy Harvesters

PROJECT TITLE :

MEMS Scale PVDF-TrFE-Based Piezoelectric Energy Harvesters

ABSTRACT:

This paper presents the design, the fabrication, and also the performance characterization of microelectromechanical systems (MEMS) scale cantilever-type piezoelectric energy harvesters (PEHs) that utilize the piezoelectric polymer polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE). Ranges are determined for device dimensions according to the calculations primarily based on mathematical models. Designed devices were fabricated using commonplace MEMS fabrication techniques. Electrodes were formed with sputtered Al and Ti/Al thin films, and a 1.three- $mu textm$ -thick PVDF-TrFE film was deposited using spin coating. Cantilevers were suspended employing a 2-step process: backside DRIE to perform the majority etch, followed by XeF2 gaseous etch for the ultimate unleash. Remnant polarization and coercive field of the fabricated devices were measured as $6.one~mu textC/textcm^two$ and seventy four.9 V/ $mu textm$ , respectively. Piezoelectric performances were evaluated by a press-and-release sort of measurement. For these measurements, custom-made probe tips connected to micropositioners were used. Based on the experimental results, maximum power output was calculated as thirty five.1 pW for a peak tip displacement of $500~mu textm$ from a $1200~mu text m times three hundred ~mu textm$ cantilever, that corresponds to an influence output density of 97.five pW/mm2. The proposed methodology has the potential to form the PEHs that are monolithically integrated with complementary metal-oxide–semiconductor circuits and lead to self-sustained low Power Electronics. [2015-0117]

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