Review of the properties of gold material for MEMS membrane applications


Materials choice for radio frequency (RF) microelectromechanical (MEM) switches application is vital for overall style and fabrication of devices. The processing techniques and microstructures of the materials in these devices differ from the techniques employed in bulk structures. Although the properties and morphology of a bulk material might be well characterised, thin film materials have properties substantially different. MEM switches for RF and cryogenic applications has been developed where the switch is integrated during a coplanar waveguide on a LaAlO3 substrate as structure with a gold membrane bridge suspended above an space of the centre superconductor (YBa2Cu3O7) lined with a BaTiO3 dielectric. The gold (Au) membrane is actuated by the electrostatic enticing force acting between transmission line and therefore the membrane when a dc management voltage is applied. The price of the actuation force greatly depends on the geometry and mechanical properties of the bridge material. A summary and review of the state-of-the-art in MEM switches using Au membrane elements is presented and its application for cryogenic temperature is mentioned.

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