Characterization of MEMS Resonator Nonlinearities Using the Ringdown Response


We tend to present a technique for estimation of the model parameters for a single-mode vibration of symmetric micromechanical resonators, as well as the coefficients of conservative and dissipative nonlinearities. The nonlinearities lead to an amplitude-dependent frequency and a nonexponential decay, that are characterised from the ringdown response. An analysis of the amplitude of the ringdown response allows one to estimate the linear damping constant and the dissipative nonlinearity, and therefore the zero-crossing points within the ringdown measurement can be used for characterization of the linear natural frequency and also the Duffing and quintic nonlinearities of the vibrational mode, which arise from a mixture of mechanical and electrostatic effects.

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