PROJECT TITLE :

A System Based on Capacitive Interfacing of CMOS With Post-Processed Thin-Film MEMS Resonators Employing Synchronous Readout for Parasitic Nulling

ABSTRACT:

Thin-film MEMS resonators fabricated at low temperatures will be processed on CMOS ICs, forming high-sensitivity transducers among complete sensing systems. A key focus for the MEMS devices is increasing the resonant frequency, enabling, among alternative edges, operation at atmospheric pressure. However, at increased frequencies, parasitics related to both the MEMS-CMOS interfaces and the MEMS device itself can severely degrade the detectability of the resonant peak. This work tries to beat these parasitics whereas providing isolation of the CMOS IC from potentially damaging sensing environments. To achieve this, an interfacing approach is proposed primarily based on capacitive coupling across the CMOS IC passivation, and a detection approach is proposed based mostly on synchronous readout. Results are presented from a prototype system, integrating a custom CMOS IC with MEMS bridge resonators. With the MEMS resonators fabricated in-house at 175°C on a separate substrate, readout results with multiple totally different resonators are obtained. In all cases, the IC enables detection with >twenty dB SNR of resonant peaks that are only weakly detectable or undetectable directly using a vector-network analyzer (VNA).


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