Fabrication of Moth-Eye Nanostructure Arrays Using Roll-to-Roll UV-Nanoimprint Lithography With an Anodic Aluminum Oxide Mold


Broadband antireflection is essential for improving the photocurrent generation of photovoltaic modules or the enhancement of visibility in optical devices. The moth-eye nanostructure is one in every of the most promising structures with potential for commercialization in the close to future and roll-to-roll ultraviolet nanoimprint lithography (R2R UV-NIL) technique provides a resolution for the commercialization due to its high speed, giant space, high resolution, and high throughput. During this study, the anodic aluminum oxide (AAO) mold is employed to supply the moth-eye nanostructure arrays upon a versatile polyethylene terephthalate substrate combining with R2R UV-NIL process, that provides a answer for continuous production of moth-eye nanostructure arrays cheaply. In addition, the influence of mold parameters and method parameters on the forming quality were investigated, respectively. The influence of method parameters was investigated by using the one-variable-at-a-time methodology, as well as feeding speed, imprinting pressure, and mold temperature. The qualitative and quantitative height analysis for the moth-eye nanostructure arrays were applied based on the atomic force microscope images. Hence, the feasibility is verified to provide moth-eye nanostructure arrays continuously with AAO mould and R2R UV-NIL technique. A fast feeding speed of 20 m/min was potential to provide smart moth-eye nanostructure arrays with mold one, that were 300 nm in diameter, three hundred nm in height. But, totally different forming results were observed because the mould parameters decreased as well as unsatisfactory demolding phenomenon and incomplete filling phenomenon. The incomplete filling phenomenon was improved to a sure extent by changing the process parameters and better forming height was accomplished with lower feeding speed, higher imprinting pressure, and higher mold temperature. This research is beneficial to provide a direction for the industrial production of the- moth-eye nanostructure arrays.

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