Study of Bubble Activity in a Megasonic Field Using an Electrochemical Technique ABSTRACT:In the megasonic cleaning of wafers, size and motion of cavitating bubbles and fluid flow due to acoustic streaming play a very important role. In this paper, chronoamperometric technique has been used to seek information on acoustic streaming and bubble activity in a 1 MHz sound field. Specifically, current transients during reduction of potassium ferricyanide were recorded. Data collected at 1-6 MHz sampling rate using a 25 μm platinum electrode show current “peaks” indicative of the approach of oscillating bubbles to the electrode and current “valleys” due to blocking of the electrode by bubbles. Acoustic streaming velocity ( ~ 1.5 cm/s) and bubble size (maximum radius of ~ 1 μm for oscillating bubbles) have been estimated from local current transients caused by bubble activity near the electrode. Did you like this research project? To get this research project Guidelines, Training and Code... Click Here facebook twitter google+ linkedin stumble pinterest Spectral Evidence of Si Complexes in HVPE-Grown GaAs Uniform, Low-Resistive Ni-Pt Silicide Fabricated by Partial Conversion With Low Metal-Consumption Ratio