Highly piezoelectric MgZr co-doped aluminum nitride-based vibrational energy harvesters [Correspondence]


The first MgZr co-doped AlN-primarily based vibrational energy harvester (VEH) is presented. (MgZr)AlN, that is a new category of doped AlN, provides high piezoelectricity and cost advantage. Using thirteenpercent-(MgZr)-doped AlN for micromachined VEHs, maximum output power of one.three μW was achieved with a Q-factor of 400 when resonant frequency, vibration acceleration, load resistance were 792 Hz, 8 m/s2, and MΩ, respectively. Normalized power density was kW.g???two.m???three. This was one amongst the highest values among the currently accessible piezoelectric VEHs.

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