High- AlN-on-Silicon Resonators With Annexed Platforms for Portable Integrated VOC Sensing


Aluminum nitride (AlN) skinny-film piezoelectric-onsilicon resonators optimized for gravimetric gas sensing are presented during this paper. Sensors with polyisobutylenefunctionalized annexed platforms exhibit a linear sensitivity of -0.09 Hz/ppm to toluene and -0.eighteen Hz/ppm to xylene. The annexed platform design enables the sensor to maintain a high Q of 3700 in air and low motional resistance of 1.1 kQ throughout operation, that ensures low-power oscillator interfacing and readout. AlN-on-Si resonators with annexed platforms are suitable for array implementation in environmental sensing microsystems that live temperature, humidity, and varied gases of importance to health and safety.

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