Performance Assessment of CMUT Arrays Based on Electrical Impedance Test Results


A quantitative quality assessment technique for capacitive micromachined ultrasonic transducer (CMUT) arrays primarily based on electrical impedance measurements created at wafer level is proposed. The resonant response in air of CMUTs is described and then used to obtain a quantitative quality worth. Many issues that would occur in CMUT arrays in addition to their effect on the output of the assessment are analyzed. This methodology has been applied on a wafer containing several CMUT designs and also the obtained results are summarized. [2014-0354]

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