PROJECT TITLE :

Fabrication of 3-D Silicon Microneedles Using a Single-Step DRIE Process

ABSTRACT:

Fabrication of 3-D microstructures is one among the foremost difficult aspects of silicon micromachining. During this paper, we have a tendency to present a novel microfabrication method using one single-step deep reactive ion etching process with gray-scale e-beam lithography mask that provides deeply etched (>350-μm deep) dual-angle 3-d microneedles with control over the height and shape of the structures. Moreover, we have a tendency to found that the form of the e-beam lithography patterns can confirm the general configuration and features of the final etched microneedles, and that the etching method parameters have the foremost impact on the microneedles' shape, like size and vertical base angle. Massive arrays of 20 × twenty microneedles with height uniformity of better than threep.c are fabricated.


Did you like this research project?

To get this research project Guidelines, Training and Code... Click Here


PROJECT TITLE : Enhanced Built-In Self-Repair Techniques for Improving Fabrication Yield and Reliability of Embedded Memories - 2016 ABSTRACT: Error correction code (ECC) and built-in self-repair (BISR) techniques by using
PROJECT TITLE :Fabrication and Characterization of Mesoscopic Perovskite PhotodiodesABSTRACT:Mesoscopic photodiodes were fabricated with hybrid organic/inorganic perovskite as absorber layer and Spiro-OMeTAD as hole transport
PROJECT TITLE :Design and Fabrication of MR-Tracked Metallic Stylet for Gynecologic BrachytherapyABSTRACT:Active magnetic resonance (MR) tracking for gynecologic brachytherapy was made possible by attaching the microradiofrequency
PROJECT TITLE :Fabrication and Characterization of a Low-g Inertial Microswitch With Flexible Contact Point and Limit-Block ConstraintsABSTRACT:A unique contact-enhanced low-g inertial microswitch has been proposed and fabricated
PROJECT TITLE :Pull-In Voltage and Fabrication Yield Analysis of All-Metal-Based Nanoelectromechanical SwitchesABSTRACT:We have a tendency to designed a 1-mask method for all-molybdenum-based laterally actuated nanoelectromechanical

Ready to Complete Your Academic MTech Project Work In Affordable Price ?

Project Enquiry