A Compact Fourier Transform Spectrometer on a Silicon Optical Bench With an Electrothermal MEMS Mirror
This paper reports a compact Fourier rework spectrometer system with a massive-stroke electrothermal microelectromechanical systems (MEMS) mirror and other optical components all integrated on a micromachined silicon optical bench with the footprint of two cm × a pair of cm. The linear optical path distinction (OPD) scan vary generated by the MEMS mirror reaches up to 450 μm, and also the tilting of the mirror plate is reduced right down to <;±0.002° by employing a new openloop management technique. A spectral resolution of forty cm-one, or 1.1 nm at 532 nm, has been achieved. The general size of the system is reduced dramatically and therefore the performance is improved considerably compared with the prior work.
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