Survey on Run-to-Run Control Algorithms in High-Mix Semiconductor Manufacturing Processes


Recently, to confirm product quality in high-mix semiconductor manufacturing processes, run-to-run (R2R) management algorithms have received increasing attention. Tough challenges are met with new and advanced approaches that address the important-world operating conditions exhibited in high-combine production environments (e.g., completely different products with completely different frequencies and high numbers of threads). In this paper, various proposed controllers for top-mix semiconductor producing processes are surveyed from an application and theoretical point of read. Remaining challenges and directions for future work also are summarized with the intent of drawing attention to those issues in the systems and method management communities.

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