Highly Sensitive Tactile Sensing Array Realized Using a Novel Fabrication Process With Membrane Filters


This paper presents a highly sensitive tactile sensing array. Sensing elements of the array comprise multiwall carbon nanotubes and polydimethylsiloxane polymer. A completely unique lithography process is proposed for fabricating an SU-eight mildew for shaping the sensing cells within the array. Additionally, a nylon membrane filter is proposed to serve as a mold for various microdome patterns, which were transferred onto a conductive polymer film. The proposed device features advantages, such as ultra-high sensitivity, flexibility, and a simple fabrication method. Tunneling piezoresistive effects of interlocked microdome structures fabricated using membrane filters with different pore sizes were observed. The measured maximum sensitivity and typical response time were approximately −7.73 kPa $^-1$ and four ms, respectively. In addition, the measured results show that the patterned polymer composite organized in a very row-column array can effectively eliminate the crosstalk result. Moreover, measurements for numerous tactile sensing applications were demonstrated. [2015-0118]

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