Comparison and Classification of High-Precision Actuators Based on Stiffness Influencing Vibration Isolation


Positioning performance of high-precision systems is influenced by vibrations transmitting from floors and sorts of the precision actuators. To construct a compact actuator with high vibration isolation for these systems, this paper investigates and categorizes precision actuators based on their stiffness for providing design rules. The effectiveness of the analysis and the planning rules is confirmed by experiments comparing 2 varieties of compact precision actuators: piezoelectric and electromagnetic (Lorentz or voice coil) actuators. The positioning system with these actuators is validated experimentally by applying step-like disturbances of approximately 160 nm to the base of the actuators. Whereas the position error of the piezo-actuated system swings by about ±two hundred nm, the Lorentz-actuated system that satisfies the look rules is able to suppress the error among a vary of ±10 nm.

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