Efficient Shape Reconstruction of Microlens Using Optical Microscopy


The imaging properties of a microlens are highly connected to its 3-D profile; therefore, it is of basic importance to live its three-D geometrical characteristics with high accuracy once industrial fabrication. But, common 3-D measurement tools are difficult to use for quick, noninvasive, and precise three-D measurement of a microlens. Depth acquisition is a direct manner to understand the three-D properties of objects in pc vision, and form from defocus (SFD) has been demonstrated to be effective for 3-D reconstruction. In this paper, a depth reconstruction methodology from blurring using optical microscopy and optical diffraction is proposed to reconstruct the global shape of a microlens. Initial, the link between the intensity distribution and therefore the depth data is introduced. Second, a blurring imaging model with optical diffraction is formulated through curve fitting, accounting for relative blurring and warmth diffusion, and a brand new SFD method with optical diffraction and defocused pictures is proposed. Finally, a polydimethylsiloxane (PDMS) microlens is used to validate the proposed SFD technique, and also the results show that its world form will be reconstructed with high precision. The average estimation error is 77 nm, and the cost time is reduced by ninety two.five% compared with atomic force microscopy scanning.

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