Bulk Mode Disk Resonator With Transverse Piezoelectric Actuation and Electrostatic Tuning


This paper presents a wine-glass bulk mode disk resonator primarily based on a completely unique transverse piezoelectric actuation technique to achieve bulk mode resonance of the one crystalline silicon disk structure. The device is fabricated during a business microelectromechnical systems (MEMS) method, and combines reasonable quality issue and superior motional resistance during a low-value technology. External capacitive electrodes are used for electrostatic tuning of the resonance frequency, relying on the electrostatic spring softening effect. The resonator was measured to possess a resonance frequency of ~15 MHz and a top quality issue of ~2000 in atmospheric pressure, increasing to ~5000 in one hundred-mtorr vacuum. The temperature co-efficient for the frequency of the device was conjointly measured to be concerning -forty ppm/°C. The resonator requires no dc voltage for operation, but its resonance frequency will be tuned by varying the applied dc voltage on the capacitive electrodes with a issue of 1 ppb/V2.

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