Low-Loss DC-100 GHz Suspended Microstrip Lines on Micromachined SiGe BiCMOS BEOL Technology


A replacement class of low-loss transmission lines implemented on the BEOL of a zero.twenty five SiGe BiCMOS technology is presented and experimentally demonstrated up to 100 GHz. The approach consists in a monolithic microstrip line suspended on an air cavity by means of 2 novel structural solutions. With respect to a standard transmission line in the identical technology, an attenuation loss reduction of up to three dB/cm has been reached at 60 GHz.

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