Distributed Intelligent MEMS: Progresses and Perspectives


Microelectromechanical systems (MEMS) analysis has, till recently, targeted mainly on the engineering process, ensuing in fascinating products and a growing market. To totally understand the promise of MEMS, the subsequent step is to feature embedded intelligence. With embedded intelligence, the scalability of producing can enable distributed intelligent MEMS systems, consisting of thousands or several units that can work together to attain a common goal. However, before such systems can become a reality, we should come to grips with the challenge of scalability, that can need paradigm shifts in each hardware and software. Furthermore, the need for coordinated actuation, programming, communication, and mobility management raises new challenges in each control and programming. The target of this paper is to report on the progress and remaining challenges in these areas by examining two examples.

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