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ABSTRACT:

The term radiofrequency (RF) microelectromechanical systems (MEMS) refers to electronic devices with a moving submillimeter-sized part (beam, comb, disc, or ring), which provide RF functionality. Alternative defi nitions include bulk or surface micromachined devices, such as thin fi lm bulk acoustic resonators (FBARs), which rely on energy transduction from the electrical energy domain to the acoustic energy domain and vice versa to provide RF functionality.


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