PROJECT TITLE :

Material Characterization and Transfer of Large-Area Ultra-Thin Polydimethylsiloxane Membranes

ABSTRACT:

Fabrication of ultra-skinny (1–twenty- $mu textm$ thickness) polydimethylsiloxane (PDMS) films is enabled with a hexane dilution process and an underlying gelatin unharness layer. The discharge and transfer of those films over giant areas (>5 cm) allows measurement of the thickness-dependent and process-dependent mechanical properties of ultra-skinny PDMS membranes, reported for the primary time. The effective Young’s modulus of 1- $mu textm$ -thick PDMS, measured by bulge testing, is approximately 10 times larger than that of zero.five-mm-thick material, following never-ending power-law relationship over the entire thickness vary. Mesh-patterned metal electrodes of two- $mu textm$ minimum feature size are embedded in selected membranes. Metal evaporation and subsequent reactive ion etch patterning on PDMS will increase its Young’s modulus because of the rise in cross-link formation and hardening of the surface. The results are meaningful in style and fabrication of soft electronics, microsensors, microvalves, and micropumps. [2014-0382]


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