Pattern Distortion Analysis of Surface Plasmon Interference Lithography Using Line Grating Structure on Photoresist


Photolithography encompasses a resolution limit of the incident wavelength that is generated by the diffraction of light. Surface plasmon (SP) may be a recently proposed nanolithography technology that overcomes this diffraction limit. During this paper, we tend to specialise in the fabrication method so as to utilize SP with an on the spot grating structure, and we tend to compare the simulation and fabrication results: the pitch of the expected patterns is 120 nm within the simulation results and 121.5 nm in the calculation results. Thus, the fabrication results establish that the period of the patterns is a hundred and fifteen nm. These results demonstrate that it's possible for photolithography to use SP. Furthermore, the random horizontal patterns within the fabrication results are analyzed, and it's found that the patterns result from the mask aspect distortion. Therefore, reducing the mask aspect distortion using different techniques could enable clearer line patterns in surface plasmon interference lithography.

Did you like this research project?

To get this research project Guidelines, Training and Code... Click Here

PROJECT TITLE : Attention in Reasoning Dataset, Analysis, and Modeling ABSTRACT: Although attention has become an increasingly popular component in deep neural networks for the purpose of both interpreting data and improving
PROJECT TITLE : Compressive Color Pattern Detection Using Partial Orthogonal Circulant Sensing Matrix ABSTRACT: To get acceptable signal reconstruction quality with compressive sensing, it's important to create a sensing matrix offering final year Java Based Pattern Analysis MTech Projects, Pattern Analysis IEEE Projects, IEEE Pattern Analysis Projects, Pattern Analysis MS Projects, Java Based Pattern Analysis BTech Projects, Pattern
PROJECT TITLE :An Enhanced Visualization Method to Aid Behavioral Trajectory Pattern Recognition Infrastructure for Big Longitudinal Data - 2018ABSTRACT:Big longitudinal knowledge offer a lot of reliable data for call creating
PROJECT TITLE :Cost-Optimal Caching for D2D Networks With User Mobility: Modeling, Analysis, and Computational Approaches - 2018ABSTRACT:Caching well-liked files at the user equipments (UEs) provides an efficient way to alleviate

Ready to Complete Your Academic MTech Project Work In Affordable Price ?

Project Enquiry