PROJECT TITLE :

Experimental and Theoretical Study of Transition Between Glow Modes of Planar Barrier Capacitive RF Discharge in Argon at One Atmosphere Pressure

ABSTRACT:

Characteristics of planar barrier radio frequency (RF) discharge in different modes at atmospheric pressure of Ar are studied experimentally and theoretically. Experimental information, also results of numeric simulation, have shown a presence of transient mode of the discharge glow, which is due to coexistence of low-current $alpha $ and high-current $gamma $ discharge modes with occurrence of a transition between the modes throughout each half cycle of RF voltage provided to the discharge.