PROJECT TITLE :

Optimized MEMS Pirani sensor with increased pressure measurement sensitivity in the fine and rough vacuum regimes

ABSTRACT:

A new microelectromechanical systems (MEMS) Pirani sensor with a working range from 10−3 to 7.6 × 102 Torr and an increased sensitivity in the rough vacuum regime is presented. The sensor design, fabrication technologies, and voltage–pressure responses of the measurements and analytical simulations are described and shown. A future perspective is given, which describes the combination of this sensor with the high vacuum sensor of our previous work to form a MEMS Pirani gauge for the high, fine, and rough vacuum ranges.