PROJECT TITLE :

Optimization of Reactive Ion Etching of Polycrystalline Diamond for MEMS Applications

ABSTRACT:

It has been found that diamond columns can be fashioned unintentionally in reactive ion etching (RIE) with O2 plasma even while not a precoated metal layer. The experimental results indicate that the existence of those diamond columns prevents the effective removal of polycrystalline diamond (poly-C), also called microcrystalline diamond. A three-step sequential RIE of poly-C skinny film in CF4 (or CF4/Ar), O2, and H2 plasmas is developed using lithographically patterned Al acting as a arduous mask to realize a sleek-etched surface once the removal of poly-C. This etching technique will remove a thick poly-C layer very effectively. For the first time, this letter eliminates RIE-connected harm to underlying substrate (specific to RIE of poly-C) to optimize the technology for single- and multi-material MEMS made from poly-C. [2015-0141]


Did you like this research project?

To get this research project Guidelines, Training and Code... Click Here


PROJECT TITLE : Pricing and Resource Allocation Optimization for IoT Fog Computing and NFV: An EPEC and Matching Based Perspective ABSTRACT: The Internet of Things (IoT) is experiencing explosive growth on a global scale, with
PROJECT TITLE : Performance Analysis and Optimization of Cache-Assisted CoMP for Clustered D2D Networks ABSTRACT: Two promising strategies for supporting massive content delivery over wireless networks while mitigating the effects
PROJECT TITLE : Multi-Query Optimization of Incrementally Evaluated Sliding-Window Aggregations ABSTRACT: The successful implementation of a large number of aggregate continuous queries is essential to the success of online analytics
PROJECT TITLE : Optimizing Speculative Execution in Spark Heterogeneous Environments ABSTRACT: In computing environments that use Spark, a few tasks that run more slowly than others can extend the total amount of time it takes
PROJECT TITLE : Multi-tier Workload Consolidations in the Cloud Profiling, Modeling and Optimization ABSTRACT: It is becoming increasingly important to cut down on tail latency in order to improve the experience that users have

Ready to Complete Your Academic MTech Project Work In Affordable Price ?

Project Enquiry