PROJECT TITLE :

Pull-In Voltage and Fabrication Yield Analysis of All-Metal-Based Nanoelectromechanical Switches

ABSTRACT:

We have a tendency to designed a 1-mask method for all-molybdenum-based laterally actuated nanoelectromechanical switches. The damascene-like method is intended to ensure a smooth, high-aspect ratio, and metal-to-metal mechanical contact. Primarily based on the statistical study of 800 devices, terribly high method yield will be achieved for mounted–mounted beam devices by choosing suitable device dimensions, i.e., the beam length versus beam width ratio should be 1.five. Typical failure modes also are discussed. [2014-0391]