Photolithographically definable SU-8–alumina composite for W-band dielectric resonator antennas


A unique method has been developed for fabricating ceramic dielectric structures with dimensions applicable to W-band millimetre wave dielectric resonator antennas. The ceramic dielectric structures are based on composites of SU-eight 2150 photoresist and alumina (Al2O3)-alpha nanopowder. The consequences of accelerating the burden proportion of Al2O3 nanopowder on the photo-polymerisation of the SU-eight-Al2O3 composite were systematically investigated. Cylindrical structures with thicknesses up to five hundred μm have been fabricated using single casted conventional ultraviolet lithography. The relative permittivity of SU-8-Al2O3 composites at different weight percentages of Al2O3 was studied showing a rise from a relative permittivity of four.five to five.sixty six with increasing the Al2O3 weight percentage from 0 to 35percent. Additionally, finally, double layer producing of ceramic SU-eight-Al2O3 composite structures was demonstrated.

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