PROJECT TITLE :

Fabrication of Self-Packaged Seamless Nanoporous SU-8 Microchannels

ABSTRACT:

Fabrication of a self-packaged partial semicircular nanoporous microchannel is demonstrated using electrospinning, self-limiting ultraviolet lithography, and thermal-reHow packaging processes with SU-eight. The fabrication process offers distinctive benefits of microresolution channel patterning, alignment free seamless integration of nanofibers during a microchannel by self-packaged reHow, and simple formation of three-D nanoporous channels. A fabricated nanoporous microchannel with a channel length of 7 mm, a channel width of 73.85 μm, and a channel height of 34.sixty five μm shows slow Huidic How through the channel, functioning as an efficient nanochannel with a similar channel height of 800 nm and a radius of 857 nm, and thus, its reduction ratios of the channel height and radius are ~97.sevenpercent and 97.eightpercent, respectively.