PROJECT TITLE :

A Study of Pressure-Dependent Squeeze Film Stiffness as a Resonance Modulator Using Static and Dynamic Measurements

ABSTRACT:

We report on the resonant frequency modulation of inertial microelectromechanical systems (MEMS) structures because of squeeze film stiffness over a range of working pressures. Squeeze film effects are studied extensively, however largely in the context of damping and $Q$ -issue determination of dynamic MEMS structures, typically suspended over a fixed substrate with a terribly thin air gap. Here, we have a tendency to show with experimental measurements and analytical calculations how the pressure-dependent air springs (squeeze film stiffness) amendment the resonant frequency of an inertial MEMS structure by as much as 5 times. For capturing the isolated impact of the squeeze film stiffness, we have a tendency to first confirm the static stiffness of our structure with atomic force microscope probing and then study the impact of the air spring by measuring the dynamic response of the structure, thus finding the resonant frequencies whereas varying the air pressure from 1 to 905 mbar. We tend to conjointly verify our results by analytical and Finite Component Method calculations. Our findings show that the pressure-dependent squeeze film stiffness can have an effect on a rather huge vary of frequency modulation (>four hundred%) and, therefore, can be used as a style parameter for exploiting this effect in MEMS devices.