Bimaterial Cantilever Focal Plane Array for Uncooled Infrared Imaging Using Sandwich-Framed Structure PROJECT TITLE :Bimaterial Cantilever Focal Plane Array for Uncooled Infrared Imaging Using Sandwich-Framed StructureABSTRACT:This paper reports a unique infrared focal plane array (FPA) using SiNx/SiO2/SiNx sandwiched structure because the supporting frames for bimaterial cantilever pixels. The device was fabricated by a bulk silicon method, where a trench backfill technique was employed to form the SiNx/SiO2/SiNx sandwiched frames. By replacing the silicon frame with SiNx/SiO2/SiNx sandwiched frame, the fill issue of the FPA is increased to forty twopercent. Compared with other substrate-free FPAs with frames making of a skinny layer of SiNx, the sandwiched frame provides a lot of supporting strength for the cantilever pixels. Meanwhile, the reliability and therefore the uniformity of the FPA were improved with a design of staggered arrangement of cantilever pixels. Thermal images of human bodies were captured successfully at space temperature. A complete analysis of device performance was also applied each theoretically and experimentally, including thermomechanical sensitivity, noise equivalent temperature distinction, and response time. Did you like this research project? To get this research project Guidelines, Training and Code... Click Here facebook twitter google+ linkedin stumble pinterest Area-Array of 3-Arc-Fan Compliant Interconnects as Effective Drop-Impact Isolator for Microsystems Fabrication and Characterization of a Low-g Inertial Microswitch With Flexible Contact Point and Limit-Block Constraints