Quality Factor Dependence on the Inactive Regions in AlN Contour-Mode Resonators


This paper investigates the dependence of the standard issue (Q) of AlN contour mode resonators (CMRs) on the characteristics of the inactive regions located between the most resonator body (active region) and the stress-free surfaces placed beside the anchors. This paper shows that it's possible to scale back the energy leakage through the anchors by optimally sizing the width of such regions. To validate this concept, we have a tendency to designed sixteen completely different configurations of 225-MHz AlN CMRs, differing just by the dimensions of the resonator inactive regions.

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