Enhanced Tracking for Nanopositioning Systems Using Feedforward/Feedback Multivariable Control Design


This paper proposes a systematic synthesis methodology for a combined feedforward/feedback design to control multiple-input, multiple-output nanopositioning systems. Coprime factorization of the open loop model is used to design the reference and feedforward filters of the proposed management theme to attain enhanced tracking, eliminate the limitation of the feedback on tracking performance, and increase the bandwidth of the closed-loop system. 2 varieties of coprime factorization, namely inner-outer factorization and normalized coprime factorization are mentioned. A case study based mostly on hardware experiment is presented to research the proposed control architecture and demonstrate its superiority over feedback-only management. As well as the no-load case, the performance of the system is also tested with hundreds on the nanopositioning stage.

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