Reflective displacement sensors with monolithically integrated VCSELs and RCEPDs


Micro-scale, reflective-type optical displacement sensors have been developed by monolithic integration of vertical cavity surface-emitting lasers (VCSELs) and resonant cavity-enhanced photodetectors (RCEPDs). This compact sensor (700 × 70zero μm) consists of an oxide-confined VCSEL that is surrounded by an RCEPD and will measure the linear distance with a measurement range of ~ten mm, that is comparable to that of conventional displacement sensors. Fabrication details and sensor performances are mentioned.

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