Novel High-Temperature Fiber-Optic Pressure Sensor Based on Etched PCF F-P Interferometer Micromachined by a 157-nm Laser


A self-enclosed fiber-optic Fabry–Perot (F–P) cavity is formed by splicing a single-mode fiber to a photonic crystal fiber (PCF) with a particular hole micromachined by a 157-nm laser at the top face of the PCF. Furthermore, such a F–P cavity is etched chemically and its high-temperature and pressure responses are investigated experimentally. The pressure sensitivity is $sim 54.7$ pm/MPa and the temperature sensitivity is $sim 0.forty five$ pm/°C. The proposed sensor could provide some glorious options like smart high-temperature stability, low cross-sensitivity between pressure and temperature, easy mass-production, making it attractive for pressure measurement under high-temperature.

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