Multiarray Micromachined Probe for Turbulence Measurements Assembled of Suspended Hot-Film Sensors


To meet the requirement to access experimentally the complete tensor of velocity derivatives at smallest scales of turbulent flows, we have a tendency to developed, fabricated, and tested an out-of-plane micromachined hot-film sensor that features a suspended one hundred-nm thick sensing element. We present a unique multiarray hot-film probe as an assembly of five arrays of 4 sensors each. Experimental results demonstrate the improved resolution of the sensor compared with a typical hot-wire and to a nonsuspended version of such a sensor. A simple and clear methodology for sensor spatial resolution evaluation is also mentioned.

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