Integrated Optical Pressure Sensors in Silicon-on-Insulator


An optical pressure sensor can be useful in many applications where electronics fall short (e.g., explosive environments). We have fabricated and characterized compact, integrated optical pressure sensors on a silicon-on-insulator platform using ring resonators and Mach–Zehnder interferometers. The silicon substrate is locally etched using KOH to produce very thin membranes of 3.28 $muhbox{m}$ . Measurements have shown that spectral features in our devices can shift up to 370 pm going from 0 to 80 kPa.

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