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Integrated Optical Pressure Sensors in Silicon-on-Insulator

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PROJECT TITLE :

Integrated Optical Pressure Sensors in Silicon-on-Insulator

ABSTRACT:

An optical pressure sensor can be useful in many applications where electronics fall short (e.g., explosive environments). We have fabricated and characterized compact, integrated optical pressure sensors on a silicon-on-insulator platform using ring resonators and Mach–Zehnder interferometers. The silicon substrate is locally etched using KOH to produce very thin membranes of 3.28 $muhbox{m}$ . Measurements have shown that spectral features in our devices can shift up to 370 pm going from 0 to 80 kPa.


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Integrated Optical Pressure Sensors in Silicon-on-Insulator - 4.9 out of 5 based on 45 votes

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