A MIMO Double Resonant Controller Design for Nanopositioners


A design of a double resonant controller to boost the high-speed nanopositioning performance of a piezoelectric tube scanner (PTS) is presented during this paper. The planning of the controller is demonstrated using a multi-input multi-output framework for damping, tracking, and cross coupling management within the PTS. A reference model management technique is applied to design the controller. The controller proposed in this paper achieves a bandwidth close to to the first resonance frequency of the PTS. The controller is robust against changes within the resonance frequency of the PTS thanks to load modification on the scanner. Experimental results using open-loop, closed-loop, and also the built-in AFM proportional integral controller are presented to point out the effectiveness of the proposed controller.

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