PROJECT TITLE :
Mode-Matching of Wineglass Mode Disk Resonator Gyroscope in (100) Single Crystal Silicon
During this paper, we tend to present four design ways to overcome (a hundred) silicon crystalline anisotropy and achieve mode-matching in wineglass-mode disk resonator gyroscope (DRG). These methods were validated through experimental characterization of additional than a hundred forty five totally different devices that arose from simulations. With the proposed methods, the frequency split of the 250-kHz DRG wineglass modes in (one hundred) silicon was reduced from >10 kHz to as low as ninety six Hz (<;0.04% of 250-kHz resonant frequency) while not any electrostatic tuning. Excellent mode-matching is then achieved using electrostatic tuning. Mode-matching was maintained inside ±ten Hz over a temperature range from -20 °C to 80 °C. The temperature dependence of quality factor is also mentioned in this paper. These results permit for the development of high-performance miniature DRGs tuned for degenerate wineglass mode operation from high-quality crystalline silicon material.
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