A Monolithic CMOS-MEMS Oscillator Based on an Ultra-Low-Power Ovenized Micromechanical Resonator


A totally monolithic complimentary metal-oxide- semiconductor-microelectormechanical systems (CMOS-MEMS) oscillator comprised of an ovenized double-ended tuning fork resonator to enable ultra-low heater power operation of only 0.forty seven mW over entire temperature span (-40 °C to eighty five °C) and a low noise sustaining circuit to realize low part noise has been demonstrated during a Taiwan Semiconductor Producing Company (TSMC) zero.35-μm CMOS method. The combination of low thermal conductivity material and high thermal isolation style is that the key to attaining ultra-low-power heater operation in an exceedingly sub-mW level. Passive temperature compensation theme is also conducted in the proposed CMOS-MEMS resonator by an oxide-metal composite structure, showing an occasional temperature coefficient of frequency (TC f ) of solely ppm/°C, which is suited for the utilization in ovenized oscillator systems. By implementing a continuing-resistance temperature control theme, the frequency drift of the resonator smaller than a hundred and twenty ppm from -forty °C to eighty five °C is demonstrated during this paper, indicating the same TC f smaller than 1 ppm/°C, a record-low value against its CMOSMEMS counterparts. The CMOS-MEMS oscillator operating at one.two MHz demonstrates a part noise of -112 dBc/Hz at one-kHz offset and -one hundred twenty dBc/Hz at one-MHz offset whereas drawing less than one.3 mW. The entire power consumption of the ovenized oscillator system is confirmed to be but 1.8 mW (oscillator + micro-oven), verifying the nice potential of low power oven-controlled MEMS oscillators realized in CMOS-MEMS technology.

Did you like this research project?

To get this research project Guidelines, Training and Code... Click Here

PROJECT TITLE :Multiphase Power Converter Integration in Si: Dual-Chip and Ultimate Monolithic IntegrationsABSTRACT:This paper deals with the monolithic integration of a multiphase generic static power converter (dc/ac or ac/dc).
PROJECT TITLE :Monolithic Integration and Design of Solution-Processed Metal-Oxide Circuitry in Organic Photosensor ArraysABSTRACT:Metal-oxide and organic semiconductors possess distinctive characteristics, such as relative high
PROJECT TITLE :Monolithic CMOS—MEMS Pure Oxide Tri-Axis Accelerometers for Temperature Stabilization and Performance EnhancementABSTRACT:A complementary metal–oxide–semiconduc-tor (CMOS)–microelectromechanical system (MEMS)
PROJECT TITLE :Porous Silicon/Silicon Hybrid Substrate Applied to the Monolithic Integration of Common-Mode and Bandpass RF FiltersABSTRACT:In order to develop high performances and miniaturized devices for RF communications,
PROJECT TITLE :A Monolithic Capacitor-Current-Controlled Hysteretic Buck Converter With Transient-Optimized Feedback CircuitABSTRACT:This paper proposes a monolithic capacitor-current-controlled hysteretic buck converter with

Ready to Complete Your Academic MTech Project Work In Affordable Price ?

Project Enquiry