A Tip-Tilt-Piston Micromirror With an Elastomeric Universal Joint Fabricated via Micromasonry


A hybrid tip-tilt-piston micromirror driven by electrostatic actuation is presented in this letter. The micromirror involves a highly doped silicon mirror and a conductive elastomeric universal joint, that are mechanically bonded and electrically interconnected. This device takes advantage of 2 distinct materials to realize a high-quality reflective surface using single-crystal silicon and a highly flexible universal joint using an elastomer. To notice this hybrid system, micromasonry techniques are utilized such that silicon and elastomer elements are fabricated separately and integrated afterward. The static and dynamic behaviors of the micromirror are characterized, indicating identical response concerning its two orthogonal scanning axes. Furthermore, the piston stroke by the compressive deformation of the elastomeric joint along z-axis is investigated.

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