The design, fabrication, and integration of micro-optical components for beam focus and steering are demonstrated in an endoscopic optical coherence tomography (OCT) system. The relevant components, a membrane-based microfluidic tunable microlens and an electrostatic 2-D scanning micromirror, are fabricated using silicon and polymer-based microelectromechanical system technologies. All components are assembled inside a 4.5 μm diameter probe. The design of the optical system, including substantiation of the need for focal length tunability, is presented, along with performance data of an OCT system using these components. A lateral resolution of about 13 μm is achieved, an improvement over fixed-focal length probes. Due to the miniaturization of the measurement head achievable using this optical microsystem, use in conventional endoscopes is possible.
Did you like this research project?
To get this research project Guidelines, Training and Code... Click Here