Electrostatic tuning of the frequency in micromachined Si-SiO2 composite resonators for temperature compensation is demonstrated and analyzed. Electrostatic tuning exploits the bias voltage dependence of frequency for the compensation. Si-SiO2 composite resonators have intrinsically small frequency variation over temperature, thus being appropriate for electrostatic tuning. We developed a tuning procedure and applied it to a flexural-mode composite resonator. Experimental results show ±2.5-ppm stability over a 90°C-wide temperature range.

Did you like this research project?

To get this research project Guidelines, Training and Code... Click Here

PROJECT TITLE :Bulk Mode Disk Resonator With Transverse Piezoelectric Actuation and Electrostatic TuningABSTRACT:This paper presents a wine-glass bulk mode disk resonator primarily based on a completely unique transverse piezoelectric
PROJECT TITLE :Simultaneous Measurement of Belt Speed and Vibration Through Electrostatic Sensing and Data FusionABSTRACT:Correct and reliable measurement of belt speed and vibration is of nice importance in an exceedingly vary
PROJECT TITLE :Measurement Methodology for Field-Coupled Soft Errors Induced By Electrostatic DischargeABSTRACT:High-speed low-power mobile devices are sensitive to electrostatic discharge (ESD)-induced soft errors, like unwanted
PROJECT TITLE :Characterization and Modeling of Nonlinearities in In-Plane Gap Closing Electrostatic Energy HarvesterABSTRACT:This paper investigates well a micro scale in-plane gap closing electrostatic energy harvester with
PROJECT TITLE :A Two-Row Interdigitating-Finger Repulsive-Torque Electrostatic Actuator and Its Application to Micromirror Vector DisplayABSTRACT:This paper presents a unique two-row interdigitating-finger repulsive-torque electrostatic

Ready to Complete Your Academic MTech Project Work In Affordable Price ?

Project Enquiry