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Electrostatic Tuning to Achieve Higher Stability Microelectromechanical Composite Resonators

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ABSTRACT:

Electrostatic tuning of the frequency in micromachined Si-SiO2 composite resonators for temperature compensation is demonstrated and analyzed. Electrostatic tuning exploits the bias voltage dependence of frequency for the compensation. Si-SiO2 composite resonators have intrinsically small frequency variation over temperature, thus being appropriate for electrostatic tuning. We developed a tuning procedure and applied it to a flexural-mode composite resonator. Experimental results show ±2.5-ppm stability over a 90°C-wide temperature range.


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Electrostatic Tuning to Achieve Higher Stability Microelectromechanical Composite Resonators - 4.9 out of 5 based on 45 votes

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