PROJECT TITLE :

High-Range Angular Rate Sensor Based on Mechanical Frequency Modulation

ABSTRACT:

We report, for the first time, an angular rate sensor based on mechanical frequency modulation (FM) of the input rotation rate. This approach tracks the resonant frequency split between two $X{-}Y$ symmetric high-$Q$ mechanical modes of vibration in a microelectromechanical systems Coriolis vibratory gyroscope to produce a frequency-based measurement of the input angular rate. The system is enabled by a combination of a MEMS vibratory high-$Q$ gyroscope and a new signal processing scheme which takes advantage of a previously ignored gyroscope dynamic effect. A real-time implementation of the quasi-digital angular rate sensor was realized using two digital phase-locked loops and experimentally verified using a silicon MEMS quadruple mass gyroscope (QMG). Structural characterization of a vacuum-packaged QMG showed $Q$ factors on the order of one million over a wide temperature range from $-40 ^{circ}hbox{C}$ to $+100 ^{circ}hbox{C}$ with a relative $x/y$ mismatch of $Q$ of 1%. Temperature characterization of the FM rate sensor exhibited less than 0.2% variation of the angular rate response between 25 $^{ circ}hbox{C}$ and 70 $^{circ}hbox{C}$ environments, enabled by the self-calibrating differential frequency detection. High-speed rate table characterization of the FM angular rate sensor demonstrated a linea-
range of 18 000 deg/s (50 r/s, limited by the setup) with a dynamic range of 128 dB. Interchangeable operation of the QMG transducer in conventional amplitude-modulated and new FM regimes provides a 156-dB dynamic range.$hfill$ [2011-0161]


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