Sell Your Projects | My Account | Careers | This email address is being protected from spambots. You need JavaScript enabled to view it. | Call: +91 9573777164

An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications

1 1 1 1 1 Rating 4.89 (18 Votes)

PROJECT TITLE :

An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications

ABSTRACT:

This paper describes the development of a micromachined microphone for aircraft fuselage arrays that are utilized by aeroacousticians to help identify aircraft noise sources and/or assess the effectiveness of noise-reduction technologies. The developed microphone utilizes piezoelectric transduction via an integrated aluminum nitride layer in a thin-film composite diaphragm. A theoretical lumped element model and an associated noise model of the complete microphone system are developed and utilized in a formal design-optimization process. Optimal designs were fabricated using a variant of the film bulk acoustic resonator process at Avago Technologies. The experimental characterization of one design is presented here, and measured performance was in line with sponsor specifications, including a sensitivity of $-39 muhbox{V/Pa}$, a minimum detectable pressure of 40.4 dB, a confirmed bandwidth up to 20 kHz, a 129.5-kHz resonant frequency, and a 3% distortion limit approaching 172 dB. With this performance—in addition to its small size—this microphone is shown to be a viable enabling technology for low-cost, high-resolution fuselage array measurements. $hfill$[2011-0185]


Did you like this research project?

To get this research project Guidelines, Training and Code... Click Here


An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications - 4.9 out of 5 based on 18 votes

Project EnquiryLatest Ready Available Academic Live Projects in affordable prices

Included complete project review wise documentation with project explanation videos and Much More...