An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications


This paper describes the development of a micromachined microphone for aircraft fuselage arrays that are utilized by aeroacousticians to help identify aircraft noise sources and/or assess the effectiveness of noise-reduction technologies. The developed microphone utilizes piezoelectric transduction via an integrated aluminum nitride layer in a thin-film composite diaphragm. A theoretical lumped element model and an associated noise model of the complete microphone system are developed and utilized in a formal design-optimization process. Optimal designs were fabricated using a variant of the film bulk acoustic resonator process at Avago Technologies. The experimental characterization of one design is presented here, and measured performance was in line with sponsor specifications, including a sensitivity of $-39 muhbox{V/Pa}$, a minimum detectable pressure of 40.4 dB, a confirmed bandwidth up to 20 kHz, a 129.5-kHz resonant frequency, and a 3% distortion limit approaching 172 dB. With this performance—in addition to its small size—this microphone is shown to be a viable enabling technology for low-cost, high-resolution fuselage array measurements. $hfill$[2011-0185]

Did you like this research project?

To get this research project Guidelines, Training and Code... Click Here

PROJECT TITLE :AlN Barriers for Capacitance Reduction in Phase-Change RF SwitchesABSTRACT:We demonstrate four-terminal GeTe-based RF switches with independent thermal actuation (switching). These devices incorporate an AlN-based
PROJECT TITLE :Surface discharges in silicone gel on AlN substrateABSTRACT:AlN substrate is widely used together with silicone gel to encapsulate power electronic circuits. It is known that the weakness of the insulation system
PROJECT TITLE :Impact of AlN Interfacial Dipole on Effective Work Function of Ni and Band Alignment of Ni/HfO2/In0.53Ga0.47As Gate-StackABSTRACT:AlN has successfully been applied to passivate the oxide/III–V interface; but,
PROJECT TITLE :Quality Factor Dependence on the Inactive Regions in AlN Contour-Mode ResonatorsABSTRACT:This paper investigates the dependence of the standard issue (Q) of AlN contour mode resonators (CMRs) on the characteristics
PROJECT TITLE :Effect of Film Thickness on the Electrical Properties of AlN Films Prepared by Plasma-Enhanced Atomic Layer DepositionABSTRACT:During this paper, AlN thin films with two different thicknesses, i.e., 7 and 47 nm,

Ready to Complete Your Academic MTech Project Work In Affordable Price ?

Project Enquiry