Piezoelectric MEMS low-level vibration energy harvester with PMN-PT single crystal cantilever


A piezoelectric MEMS vibration energy harvester with PMN-PT single material has been developed, which will convert low-level vibration energy into electrical energy. Compared with the conventional piezoelectric material, the PMN-PT single crystal incorporates a higher coupling coefficient and electromechanical coefficient, that can improve the conversion potency of the facility generating device. The designed device consists of a composite cantilever beam and an Ni proof mass, which is fabricated using UV-LIGA technology. Test results show that the fabricated vibration energy harvester can generate a most output power of two.704 W with a two.08 VP-P output voltage, at a resonant frequency of 237.4 Hz and 1.0g acceleration level.

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