A 220-325-GHz millimetre-wave phase-shift measurement system is described. The differential phase-shift measurement uncertainty is estimated to be 0.58°-1.32° for a 0-60 dB rotary vane attenuator (RVA) at 325-GHz. The phase-shift of a WR-03 waveguide shim is measured as a line standard to verify the system. Measurement results of a WR-03 RVA are also presented.
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