Integration of 1D planar silica GRIN lenses in 3D optical interconnect system


Reported is the integration of 1D planar silica graded index (GRIN) lenses in a 3D optical interconnect system to reduce free-space propagation loss. The 3D optical interconnect system consists of a pair of facing-up and facing-down 45° micro-mirrors that establish a vertical optical transmission path between stacked dies. Without the silica lens, experimental measurement shows optical power loss of 33.7dB. A pair of GRIN lenses is then integrated into the system. Optical test shows that the system performance is improved by more than 25dB.

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