Sell Your Projects | My Account | Careers | This email address is being protected from spambots. You need JavaScript enabled to view it. | Call: +91 9573777164

Reconfigurable Piezoelectric MEMS Resonator Using Phase Change Material Programmable Vias

1 1 1 1 1 Rating 4.59 (54 Votes)

PROJECT TITLE :

Reconfigurable Piezoelectric MEMS Resonator Using Phase Change Material Programmable Vias

ABSTRACT:

This paper reports on the demonstration of a reconfigurable aluminum nitride (AlN) piezoelectric microelectromechanical systems (MEMS) resonator using part change material (PCM) programmable vias. Two $10hbox-mu textmtimes 10hbox-mu textm$ Ge50Te50 PCM programmable vias are monolithically integrated with a piezoelectric MEMS resonator, and used to dynamically reconfigure the terminal connections of its top and bottom electrodes, that determine the distribution of the electric field across the piezoelectric layer and thus the equivalent electrical impedance of the resonator. The power to reconfigure the device to control in four different states is experimentally demonstrated: 1) lateral field excitation mode (both vias $scriptstyle OFF$ ); two) resonator static capacitance, $C_0approx 484~rm fF$ ; 3) motional resistance, $R_mapprox 320~Omega$ ; four) thickness field excitation mode-high impedance (via one $scriptstyle ON$ , $C_0approx 564~rm fF$ ; $R_mapprox 470~Omega )$ ; five) thickness field excitation mode-low impedance (via two $mathbfscriptstyle ON$ , $C_0approx 1459~rm fF$ ; $R_mapprox 155~Omega )$ ; and 6) SHORT (each vias


Did you like this research project?

To get this research project Guidelines, Training and Code... Click Here


Reconfigurable Piezoelectric MEMS Resonator Using Phase Change Material Programmable Vias - 4.6 out of 5 based on 54 votes

Project EnquiryLatest Ready Available Academic Live Projects in affordable prices

Included complete project review wise documentation with project explanation videos and Much More...