Relationship Between Zero-Rate Output and the MEMS Element in a Closed-Loop System


This paper analyzes how zero-rate output (ZRO) arises in the response signal of a MEMS gyroscope. ZRO challenges the performance of MEMS gyroscopes, and so as to avoid it by style, information of its cause is important. During this paper, the foremost relevant error sources are analyzed at the signal path level, that may be a additional general approach than that specialize in specific designs. An analysis underscores the general understanding, which is critical in order to boost the overall performance and the robustness of MEMS gyroscopes. A technique to approximate nonlinear models through the coupling of two linear models is presented. The standard of the approximation and the required preconditions are shown. The theoretical results are verified by numerical simulations. An extension of the model to other nonlinearities is additionally mentioned. With this approximation, the signal ways within the system, and particularly those caused by the nonlinearity, lend themselves to an analysis.

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