Control of Epitaxial Growth of SiGe


Silicon-Germanium (SiGe), used to spice up pFET performance and enhance the properties of high- metal gate devices, is grown by selective epitaxy on silicon. Since device parameters depend critically on the deposited SiGe thickness, we have a tendency to apply many advanced techniques to regulate deposition. Feedback and feed-forward of growth rate knowledge is employed to control deposition tools. We conjointly apply a pattern-density based predictive growth rate, since pattern density effects cause the deposited thickness to be completely different across completely different product chips beneath otherwise identical conditions. We have a tendency to use run to run analysis of deposition information and a feature of the deposition tool to tune cross wafer deposition rates for optimized uniformity. Finally, we tend to take into account local (at intervals chip) growth rate variation. We have a tendency to demonstrate that the deposited layer thickness is in acceptable range for device performance across a product chip.

Did you like this research project?

To get this research project Guidelines, Training and Code... Click Here

PROJECT TITLE :Channel Tracking With Flight Control System for UAV mmWave MIMO Communications - 2018ABSTRACT:Unmanned aerial vehicle (UAV) communications could offer flexible scheduling, improved reliability, enhanced capability
PROJECT TITLE :Adaptive Contention Window Control Scheme in Wireless Ad Hoc Networks - 2018ABSTRACT:This competition mechanism of the IEEE 802.11 distributed coordination function (DCF) is understood to own some drawbacks, e.g.,
PROJECT TITLE :Peak-to-Average Power Control via Tone Reservation in General Orthonormal Transmission Systems - 2018ABSTRACT:During this Project, we study the tone reservation method for reducing the peak-to-average power ratio
PROJECT TITLE :Optimal Hybrid Spectrum Sensing Under Control Channel Usage Constraint - 2018ABSTRACT:Cooperative spectrum sensing significantly improves the detection reliability of a cognitive radio network. In cooperative spectrum
PROJECT TITLE :Decentralized DC Microgrid Monitoring and Optimization via Primary Control Perturbations - 2018ABSTRACT:We have a tendency to treat the emerging power systems with direct current (dc) microgrids, characterized with

Ready to Complete Your Academic MTech Project Work In Affordable Price ?

Project Enquiry